Perpendicularly-Oriented Block Copolymers Containing Silicon-Rich Hyperbranched Polymers for High Resistance to O<sub>2</sub>-RIE

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ژورنال

عنوان ژورنال: Journal of Photopolymer Science and Technology

سال: 2017

ISSN: 0914-9244,1349-6336

DOI: 10.2494/photopolymer.30.191